JPS6212855B2 - - Google Patents
Info
- Publication number
- JPS6212855B2 JPS6212855B2 JP13841778A JP13841778A JPS6212855B2 JP S6212855 B2 JPS6212855 B2 JP S6212855B2 JP 13841778 A JP13841778 A JP 13841778A JP 13841778 A JP13841778 A JP 13841778A JP S6212855 B2 JPS6212855 B2 JP S6212855B2
- Authority
- JP
- Japan
- Prior art keywords
- oxide film
- distribution
- light
- insulator
- trap
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000012212 insulator Substances 0.000 claims description 11
- 238000000034 method Methods 0.000 claims description 10
- 230000005484 gravity Effects 0.000 claims description 6
- 239000004020 conductor Substances 0.000 claims description 5
- 230000005865 ionizing radiation Effects 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
- 230000002238 attenuated effect Effects 0.000 claims 1
- 239000010408 film Substances 0.000 description 41
- 229910052710 silicon Inorganic materials 0.000 description 13
- 239000010703 silicon Substances 0.000 description 13
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 12
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 9
- 229910052814 silicon oxide Inorganic materials 0.000 description 9
- 239000000758 substrate Substances 0.000 description 9
- 238000005259 measurement Methods 0.000 description 5
- 239000002800 charge carrier Substances 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 2
- 230000001066 destructive effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 238000000691 measurement method Methods 0.000 description 2
- 238000011109 contamination Methods 0.000 description 1
- 238000005315 distribution function Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010893 electron trap Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 239000003574 free electron Substances 0.000 description 1
- 229910003437 indium oxide Inorganic materials 0.000 description 1
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000003949 trap density measurement Methods 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Semiconductor Integrated Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13841778A JPS5565144A (en) | 1978-11-11 | 1978-11-11 | Measuring method of distribution of charge trap center in insulator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13841778A JPS5565144A (en) | 1978-11-11 | 1978-11-11 | Measuring method of distribution of charge trap center in insulator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5565144A JPS5565144A (en) | 1980-05-16 |
| JPS6212855B2 true JPS6212855B2 (en]) | 1987-03-20 |
Family
ID=15221469
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13841778A Granted JPS5565144A (en) | 1978-11-11 | 1978-11-11 | Measuring method of distribution of charge trap center in insulator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5565144A (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5559359A (en) * | 1994-07-29 | 1996-09-24 | Reyes; Adolfo C. | Microwave integrated circuit passive element structure and method for reducing signal propagation losses |
-
1978
- 1978-11-11 JP JP13841778A patent/JPS5565144A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5565144A (en) | 1980-05-16 |
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